| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle irradiation device suppressing leakage of a beam from a turned-off grid, and having a neutralizer having an excellent neutralization effect; a frequency adjustment device using it; and a charged particle control method. SOLUTION: An ion gun 11 introduces Ar gas into a body 111 from a gas introduction part 114, and generates D.C. hot-cathode discharge between a filament 113 and an anode 112 to generate plasma of Ar. Then, a voltage gradient is provided to split acceleration grids 116a and 116b having two split structures in a direction for emitting ions to emit ions. A positive voltage is applied to the split acceleration grid on the side for turning off an ion beam, and a negative voltage is applied to a deceleration grid 117. Thereby, leakage of the ion beam from the grid on the stopping side is suppressed, and the neutralization effect of the neutralizer can be improved. COPYRIGHT: (C)2009,JPO&INPIT |
