| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece suction table which has flexural rigidity and is made lightweight. SOLUTION: Cylindrical through-holes 13 and 14 are formed in a suction table body 12 made of gabbro longitudinally and laterally in parallel to each other. While the flexural rigidity of the suction table body 12 is maintained by the through-holes 13 and 14, the suction table body 12 is made lightweight to be easily transported and moved and returned when a workpiece is processed. COPYRIGHT: (C)2009,JPO&INPIT |
