| 摘要 |
PROBLEM TO BE SOLVED: To draw a precise pattern on a substrate surface. SOLUTION: A drawing clock signal Bclk for determining timing of blanking an electron beam is generated based on a time calculated based on distances from a reference position to a drawing start position of starting the drawing of the pattern and a drawing finish position, and a speed of an irradiation position (or incident position) of the electron beam moving along a spiral track STr, when forming the pattern along the spiral track STr. The electron beam is thereby blanked in an interval from the drawing finish position of the pattern to the drawing start position of the next pattern, based on the drawing clock signal Bclk, and the patterns are drawn sequentially along the spiral track STr. COPYRIGHT: (C)2009,JPO&INPIT
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