发明名称 RADIATION-SENSITIVE RESIN COMPOSITION
摘要 <p>Disclosed is a radiation-sensitive resin composition that, even when a novolak resin is used, is less likely to evolve an outgas from a resin film after heat firing. Also disclosed is an organic electroluminescent element comprising an insulating film formed by radiation lithography using the composition. The radiation-sensitive resin composition comprises (A) a novolak resin comprising repeating units having a structure in which at least a methyl group, a phenyl group, or a hydroxyphenyl group has been bonded instead of hydrogen atoms in methylene groups which bond phenols to each other, (B) at least one heat-reactive compound selected from the group consisting of benzoxazine compounds, carbodiimide compounds, triazine thiol compounds, and bismaleimide compounds, and (C) a radiation-sensitive compound.</p>
申请公布号 WO2009113490(A1) 申请公布日期 2009.09.17
申请号 WO2009JP54421 申请日期 2009.03.09
申请人 NAGASE CHEMTEX CORPORATION;TAKEDA, TAKASHI;KOTANI, NORIHISA 发明人 TAKEDA, TAKASHI;KOTANI, NORIHISA
分类号 G03F7/023;G03F7/004;H01L21/027;H05B33/12;H05B33/22 主分类号 G03F7/023
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