发明名称 SUBSTRATE HAVING A CHARGED ZONE IN AN INSULATING BURIED LAYER
摘要 <p>The invention relates to a substrate comprising successively a base wafer (1), an insulating layer (2) and a top semiconductor layer (3), characterised in that the insulating layer (2) comprises at least a zone wherein the density of charges is in absolute value higher than 1010 charges/cm2. The invention also relates to a process for making such a substrate.</p>
申请公布号 WO2009112894(A1) 申请公布日期 2009.09.17
申请号 WO2008IB52203 申请日期 2008.03.13
申请人 S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES;ALLIBERT, FREDERIC;GAUDIN, GWELTAZ;LALLEMENT, FABRICE;LANDRU, DIDIER;LANDRY, KARINE;SHAHEEN, MOHAMAD;MAZURE, CARLOS 发明人 ALLIBERT, FREDERIC;GAUDIN, GWELTAZ;LALLEMENT, FABRICE;LANDRU, DIDIER;LANDRY, KARINE;SHAHEEN, MOHAMAD;MAZURE, CARLOS
分类号 H01L29/78 主分类号 H01L29/78
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