发明名称 PROCESS CONTROL SYSTEM, METHOD FOR MANAGING PROCESS IMPLEMENTATION DEVICE, METHOD AND PROGRAM FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a process control system etc., which reduces processes of a host computer and facilitates maintenance of programs of the host computer. <P>SOLUTION: The process control system 21a includes a controller 31a, a stocker 32a, and a processing device 33a. The controller 31a acquires, from a host computer 11, a first information group including information associated with a plurality of processes for manufacturing a product, acquires a second information group including information uniquely generated in at least one of processes implemented in the processing device 33a, and controls the processing device 33a based upon the information of the first group and the information of the second group. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009212409(A) 申请公布日期 2009.09.17
申请号 JP20080055775 申请日期 2008.03.06
申请人 SEIKO EPSON CORP 发明人 SATO TOKUHIRO;SATO GIICHI
分类号 H01L21/02;G05B19/418 主分类号 H01L21/02
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