| 发明名称 |
FLUID BEARING, STAGE APPARATUS, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fluid bearing capable of preventing stability from being decreased and unexpected behavior from occurring. <P>SOLUTION: The fluid bearing includes a first recess formed in a first surface of a first member, a second recess formed inside the first recess, and a fluid blowoff part provided inside the second recess. <P>COPYRIGHT: (C)2009,JPO&INPIT |
| 申请公布号 |
JP2009209962(A) |
申请公布日期 |
2009.09.17 |
| 申请号 |
JP20080050781 |
申请日期 |
2008.02.29 |
| 申请人 |
NIKON CORP |
发明人 |
AOYAMA TOSHIRO;KAKINUMA YASUHIRO;KOIZUMI KEITA;KOBAYASHI YOSHIYUKI |
| 分类号 |
F16C32/06;H01L21/027;H01L21/683 |
主分类号 |
F16C32/06 |
| 代理机构 |
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