| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide improved methods, and related systems and devices, for fabricating selectively patterned piezoelectric substrates suitable for use in a wide variety of systems and devices. <P>SOLUTION: A method includes providing a piezoelectric substrate having a protrusion of substrate material, depositing an electrically conductive coating so as to cover a portion of a side of the substrate and protrusion, and removing a portion of the coated protrusion. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
