| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical scanner capable of preventing a reflection face from being deformed. SOLUTION: The optical scanner 1 is structured with the body 2 mounted on a base 3. The body 2 includes a fixing frame 6 on the outside and an oscillation body 10 on the inside, wherein the oscillation body 10 includes a reflection mirror 8 having a substantially round shape in plan view and having a reflection face 8A formed. The oscillation body 10 also includes: a pair of mirror holding beams 11, 11 which extends, flush with the outside in both radial directions orthogonal to an oscillating axis 15, from the outer circumferential face of the reflection mirror 8 and which is connected to a mirror holding frame 7 having a square shape in plan view and arranged in a manner surrounding the circumference of the reflection mirror 8; and a pair of beams 16A, 16B which extends flush with the outside direction from both side faces in the oscillating axis 15 direction of the mirror holding frame 7 and which joins the mirror holding frame 7 to the fixing frame 6. In addition, in each frame side-board spring parts 18A-18D, there are stacked lower electrodes 21A-21D, piezoelectric elements 22A, 22B, and upper electrodes 23A-23D respectively. COPYRIGHT: (C)2009,JPO&INPIT
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