| 摘要 |
PROBLEM TO BE SOLVED: To provide an inkjet recording head with higher reliability by increasing adhesion of a pillar wall. SOLUTION: The inkjet recording head includes a discharge port 22, an ink liquid chamber 48, an ink discharging energy generating element 2, an ink supply port 20, an ink channel 49, and a pillar wall 45 arranged between the ink supply port 20 and the ink channel 49. A recessed opening 42 is formed on a silicon nitride film 11 of the uppermost layer among a plurality of films formed on the ink discharging energy generating element 2. The second bottom face 45c of the pillar wall 45 is joined to a plasma oxide film 7 in a layer lower than the silicon nitride film 11 through the recessed opening 42. COPYRIGHT: (C)2009,JPO&INPIT
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