| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a physical quantity measuring device with high detection precision of a physical quantity of an object. <P>SOLUTION: A vibration gyro 1 includes a base part 13 formed by processing a piezoelectric substrate 10, and two vibration arms 11, 12 extended from one end side of the base part 13. Piezoelectric thin plates 51, 52 are adhered and fixed in the vicinity of a rooted part with the base part 13 of each of the vibration arms 11, 12 on one face of the piezoelectric substrate 10 respectively. In addition, constricting parts 21, 22 formed by removing the piezoelectric substrate 10 in prescribed width and prescribed depth are formed on a region overlapped in planar view with the piezoelectric thin plates 51, 52 of faces opposed to faces providing the piezoelectric thin plates 51, 52 of the piezoelectric substrate 10. <P>COPYRIGHT: (C)2009,JPO&INPIT |
