DEVICE AND METHOD FOR MEASURING GAS CONCENTRATION, DEVICE AND METHOD FOR MEASURING CUMULATIVE GAS AMOUNT, AND DEVICE AND METHOD FOR ESTIMATING REMOVAL LIMIT OF REMOVAL AGENT IN GAS REMOVAL DEVICE

摘要

PROBLEM TO BE SOLVED: To measure gas concentration of gas-containing air containing VOC gas with one kind of concentration sensor even when it exceeds a concentration measuring range of the concentration sensor 12.

SOLUTION: When the concentration sensor 12 is disposed in a concentration measuring channel 10 branched and formed from a discharge channel 2, the concentration measuring channel 10 includes an on-off valve 16 for being located on the upstream of the concentration sensor 12, and applying cleaning air to dilute the gas-containing air. When the gas measuring concentration is determined to be a maximum measuring range or higher of the concentration sensor, the on-off valve 16 is open-controlled to perform the dilution, and the concentration when the dilution is not performed is calculated from the measured concentration in the diluted state.

COPYRIGHT: (C)2009,JPO&INPIT