摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a surface-emitting laser array using photonic crystal capable of sharing an active layer without breaking connection of the active layer between adjacent separate surface-emitting lasers so that high density arraying is easily enabled. <P>SOLUTION: Two or more surface-emitting lasers are formed on a substrate in this surface-emitting laser array. The surface-emitting laser has a lamination structure of a plurality of semiconductor layers including a semiconductor multi-layer film mirror, the active layer and a photonic crystal having a refractive index distribution in an in-plane direction. By the photonic crystal and the semiconductor multi-layer mirror constituting the lamination structure, a waveguide for guiding a resonance mode is formed. Between adjacent surface-emitting lasers in the surface-emitting laser array, there is a region where no photonic crystal is provided, and further, between the surface-emitting lasers, the semiconductor multi-layer film mirror and the active layer are shared. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |