HEATING APPARATUS AND HEATING METHOD

摘要

PROBLEM TO BE SOLVED: To control temperature distribution of a heating object in a heating apparatus for heating the heating object by means of induction heating. SOLUTION: A heating apparatus is configured so as to include: a processing container containing a heating object therein; a coil provided so as to surround the processing container; a high frequency power supply for supplying a high frequency to the coil to form an induction magnetic field around the heating object so as to heat the heating object by electro-magnetic induction; and a temperature distribution control member that is provided in the induction magnetic field and made of a conductor for relaxing the surrounding induction magnetic field to control the temperature distribution of the heating object. For example, temperature control can be easily carried out by constructing the temperature distribution control member so as to be movable to any position with respect to the coil and adjusting the position according to a processing condition. COPYRIGHT: (C)2009,JPO&INPIT