CLOCK SIGNAL GENERATING METHOD, CLOCK SIGNAL GENERATING DEVICE, ELECTRON BEAM DRAWING DEVICE, METHOD FOR MANUFACTURING MASTER DISK AND METHOD FOR MANUFACTURING INFORMATION RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To generate a clock signal for drawing a fine pattern in an optional position on a substrate without changing the size of the fine pattern. SOLUTION: First and second clock signals are formed, for performing blanking of an electron beam made incident on concentric tracks of the substrate on the surface of which the concentric tracks having a prescribed reference point as a center and equal pitches are regulated and which is moved along a spiral track corresponding to the concentric tracks relatively to the radiation position of the electron beam. A pattern group composed of a plurality of fine patterns is formed by using the first clock signal and then blanking of the electron beam is performed by using the second clock signal. Thereby, adjustment of the position from which formation of the fine pattern group based on the first clock signal is started can be performed. COPYRIGHT: (C)2009,JPO&INPIT