| 摘要 |
PROBLEM TO BE SOLVED: To provide an objective lens optical system which sufficiently correct aberration caused by the presence of cover glasses even when cover glasses having various thickness are used, and easily and sufficiently correct aberration caused by the difference in wavelengths upon observing a sample or the like by varying wavelengths. SOLUTION: The sum of the thickness of a transmissive material as an object and a transmissive material for adjustment is controlled to be within a given range. The position of a movable lens is adjusted along the optical axis with respect to a fixed lens based on the wavelength of a beam made incident on the lens system. COPYRIGHT: (C)2009,JPO&INPIT
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