| 摘要 |
A space necessary to install an exhaust pump and a driving portion for a gate valve is reduced to make an entire apparatus compact. A vacuum processing apparatus includes a vacuum chamber, an exhaust pump communicating with the exhaust port of the vacuum chamber, and a gate valve having a valve body which moves in a direction to come close to and separate from the exhaust port and opens/closes the exhaust port. The vacuum chamber is provided with a connecting portion extending from the exhaust port in a direction inclined from the moving direction of the valve body. The connecting portion is connected to the exhaust pump. The gate valve includes the valve body arranged in the vacuum chamber, and a driving portion having a rod which extends in the moving direction of the valve body and drives the valve body. The driving portion is arranged outside the connecting portion.
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