METHOD AND APPARATUS FOR PRECURSOR DELIVERY SYSTEM FOR IRRADIATION BEAM INSTRUMENTS

摘要

A precursor delivery system for an irradiation beam instrument having a vacuum chamber includes an injection tube (340) for injecting gasses into the vacuum chamber of the instrument and a main gas line (290) having an inlet (295) and an outlet 335). The outlet (335)is connected to the injection tube, (340) and the inlet (295) is connected to a sequential pair of valves (120, 125) connected to a carrier gas source (150). A crucible (190) for holding precursor material is selectively connected to the main gas line (290) at a location between the pair of valves (120, 125) and the injection tube (340). The source (150) of carrier gas may be selectively connected to the inlet (295) by sequential operation of the pair of carrier gas valves (120, 125), so that pulses of carrier gas assist the flow of precursor material to the injection tube (340). Rapid purging of the system between precursors is enabled by a valve (110) selectively connecting the main line (290) to an envelope (300) in communication with the instrument vacuum. Methods of CVD and etching using the system are also disclosed.