NON-CONTACT PLANAR STAGE AND METHOD OF CONTROLLING THE SAME

摘要

A non-contact planar stage and a control method thereof are provided to extend a driving area by enlarging a conductive plate. A first directional linear induction motor unit includes a plurality of linear induction motors arranged in parallel. A second directional linear induction motor unit includes a plurality of linear induction motors arranged in an orthogonal direction to the first directional linear induction motor unit. At least one of the linear induction motors is arranged to generate the thrust of the opposite direction of the other linear induction motors inside the same linear induction motor unit. Each linear induction motor includes a plurality of ferromagnetic cores and a coil wound around the ferromagnetic cores. A non-contact planar stage(100) is moved on the conductive plate with a ferromagnetic uneven part(300) by the magnetic force generated between the first directional linear induction motor unit, the second directional linear induction motor unit, and a conductive plate(310).