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发明名称
具有电极排列之基板卡匣
摘要
一种具有电极排列之基板卡匣,包含有:一架体,底部具有一导电块,该导电块具有复数第一槽以及复数第二槽彼此平行且交替设置;该架体顶部具有复数固定件,每一第二槽内设有绝缘件;复数第一电极板;复数第二电极板;以及复数支撑件,设置于各该第一电极板的底段两面,以及设置于各该第二电极板的底段两面,该等支撑件与该等固定件上下相对且形成一限制空间可供基板置入于其间,该等支撑件即承接该等基板。藉此,其内部的电极排列适合多个基板置入,并可承载多片基板,适用于化学气相沉积的制程。
申请公布号
TW200939503
申请公布日期
2009.09.16
申请号
TW097108571
申请日期
2008.03.11
申请人
东捷科技股份有限公司
发明人
杨正安;何建立;叶公旭;黄明鸿
分类号
H01L31/18(2006.01)
主分类号
H01L31/18(2006.01)
代理机构
代理人
刘绪伦
主权项
地址
台南县新市乡南科五路6号3楼
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