| 摘要 |
PROBLEM TO BE SOLVED: To produce a bulk Si-C-N ceramic material having a high apparent density and a uniform structure. SOLUTION: The bulk Si-C-N ceramic material has an amorphous phase as the principal phase or has a structure having <=100 nm grain diameter or <=100nm average particle diameter of a deposited phase and has >=2.32 g/cm3 apparent density. In the production of the ceramic material, a high molecular precursor containing Si, C and N is fired and sieved and the resulting power of <=100 μm is compacted and densified by applying >=250 MPa pressure or stress at >=1,000 deg.C. |
