发明名称 Hard film for cutting tool
摘要 A hard film is provided having excellent abrasion resistance in cutting high hardness quenched steel. There is provided a hard film for a cutting tool that is to be formed on a base material, wherein the hard film has a multilayered film layer formed by alternately layering two or more layers each of a first film layer and a second film layer; the first film layer is a film layer that contains at least Al and Cr as metal components, N as a non-metal component, and unavoidable impurities; the second film layer is a film layer that contains at least Ti and Si as metal and semimetal components, N as a non-metal component, and unavoidable impurities; the thickness of each of the first film layers and the second film layers is set to 1 nm or more and 20 nm or less; and the second film layer has a mixed structure of an amorphous part and granular micro crystals having an average particle diameter of 1 nm or more and 20 nm or less, wherein 10 or more micro crystals of the second film layer penetrate into the adjacent first film layer to a depth of 10% or more of the thickness of the first film layer in an area of 1 µm × 1 µm when the multilayered film layer is observed using a cross section TEM method.
申请公布号 EP2100985(A1) 申请公布日期 2009.09.16
申请号 EP20090001334 申请日期 2009.01.30
申请人 UNION TOOL CO. 发明人 SATO, AKIRA;KAWAMURA, KAZUHIRO;YAMAYA, TAKANORI
分类号 C23C28/00;C23C14/06;C23C30/00 主分类号 C23C28/00
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