| 摘要 |
In a processing, such as cleaning, it is intended to realize not only use of a cleaning liquid but also regeneration of the used cleaning liquid and reuse as a regenerated cleaning liquid. There is provided a liquid regenerating apparatus comprising recovery means for recovery of any cleaning liquid used by processing equipment where a cleaning liquid is used; regenerating means for regeneration of the recovered used cleaning liquid to thereby obtain a regenerated cleaning liquid; supply means for supply of the regenerated cleaning liquid to the processing equipment; and control means for control of the recovery means, regenerating means and supply means. The apparatus may be further provided with linking means for, in order to realize simultaneous operation of the processing equipment and the regenerating means, conducting therebetween supply of the used cleaning liquid and regenerated cleaning liquid.
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