Increasing die strength by etching during or after dicing,申请号GB20040024195-传众专利搜索

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发明名称	Increasing die strength by etching during or after dicing
摘要
申请公布号	GB2420443(B)	申请公布日期	2009.09.16
申请号	GB20040024195	申请日期	2004.11.01
申请人	XSIL TECHNOLOGY LIMITED;ELECTRO SCIENTIFIC INDUSTRIES, INC.	发明人	ADRIAN BOYLE;DAVID GILLEN;RICHARD TOFTNESS;KALI DUNNE;EVA FERNANDES GOMEZ
分类号	H01L21/78;H01L21/3065	主分类号	H01L21/78
代理机构		代理人
主权项
地址

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