发明名称 On-wafer AC stress test circuit
摘要 To make an alternating current (AC) stress test easier to perform in a wafer, an AC stress test circuit for performing the AC stress test on a test device fabricated in a test region of the wafer includes an oscillator module fabricated in the test region, a diode module fabricated in the test region coupled to an output of the oscillator module, and a select transistor fabricated in the test region having a gate terminal coupled to an output of the diode module, a second terminal coupled to a gate of the test device, and a third terminal coupled to a test voltage source.
申请公布号 US7589551(B1) 申请公布日期 2009.09.15
申请号 US20080107772 申请日期 2008.04.23
申请人 UNITED MICROELECTRONICS CORP. 发明人 YANG YUN-CHI;LAI CHAO-YUNG;LIN CHAO-YANG;LIN CHENG-LI;SU KUAN-CHENG
分类号 G01R31/26;G01R31/02 主分类号 G01R31/26
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