| 摘要 |
A specimen imaging apparatus is provided that is capable of improved high-speed operation compared to conventional apparatuses. The specimen imaging apparatus is provided with a microscope for enlarging the image of a specimen, and taking the enlarged image of the specimen obtained by the microscope. The apparatus is provided with a vibration detector for detecting a relative vibration between the objective lens of the microscope and the specimen mounted in the microscope, a focuser for focusing before the vibration detected by the vibration detector has attenuated to less than a predetermined value, and a controller for determining whether or not a vibration detected by the vibration detector is less than a predetermined value. The specimen imaging apparatus is configured so as to take the enlarged image of a specimen when the controller has determined that the vibration is less than a predetermined value.
|
