发明名称 |
Camera and illumination matching for inspection system |
摘要 |
An inspection tool includes a camera having a gain value and an offset value set to provide a first camera output indicating a first desired average gray value when the camera is illuminated with a precision light source set at a first light level. The inspection tool includes an inspection light source configured to be set at a second light level such that when the inspection light source illuminates a known target, the camera provides a second output indicating a second desired average gray value.
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申请公布号 |
US7589783(B2) |
申请公布日期 |
2009.09.15 |
申请号 |
US20040890862 |
申请日期 |
2004.07.14 |
申请人 |
RUDOLPH TECHNOLOGIES, INC. |
发明人 |
SIMPKINS PATRICK;WATKINS CORY |
分类号 |
H04N7/18;G01N21/88;G01N21/95;H04N5/20;H04N5/222 |
主分类号 |
H04N7/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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