发明名称 Camera and illumination matching for inspection system
摘要 An inspection tool includes a camera having a gain value and an offset value set to provide a first camera output indicating a first desired average gray value when the camera is illuminated with a precision light source set at a first light level. The inspection tool includes an inspection light source configured to be set at a second light level such that when the inspection light source illuminates a known target, the camera provides a second output indicating a second desired average gray value.
申请公布号 US7589783(B2) 申请公布日期 2009.09.15
申请号 US20040890862 申请日期 2004.07.14
申请人 RUDOLPH TECHNOLOGIES, INC. 发明人 SIMPKINS PATRICK;WATKINS CORY
分类号 H04N7/18;G01N21/88;G01N21/95;H04N5/20;H04N5/222 主分类号 H04N7/18
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