| 摘要 |
An oscillator device and a method of producing the same, that enables adjustment of an inertia moment or a gravity center position of an oscillating member through wide range and at high speed, wherein the oscillating member oscillates about an oscillation axis 17 and it includes a movable element 11 and a mass adjusting member 19, a cavity 30 being defined between the movable member 11 and a portion of the mass adjusting member 19, such that, in response to irradiation of the mass adjusting member 19 with a laser beam, a material of the mass adjusting member contiguous to the cavity 30 is partly removed, the material being removed thereby including a portion of the mass adjusting member not irradiated with the laser beam. |
