摘要 |
[PROBLEMS] To provide a long service life and highly reliable surface-emitting laser structure and to provide a method for manufacturing such surface-emitting laser. [MEANS FOR SOLVING PROBLEMS] A surface-emitting laser is provided with a lower Bragg reflector, which is arranged on an upper section of a substrate and includes a plurality of semiconductor layers, and a resonator, which is arranged on an upper section of the lower Bragg reflector and includes a lower semiconductor layer and an upper semiconductor layer. The lower semiconductor layer includes a first insulating layer having an active layer and an opening section arranged at the lower section of the active layer. The upper semiconductor layer is arranged on an upper section of the active layer and includes a second insulating layer having an opening section. The surface-emitting layer is also provided with an upper Bragg reflector which is arranged on an upper section of the resonator and includes a plurality of semiconductor layers. The uppermost layer among the semiconductor layers of the lower Bragg reflector forms an air gap for covering the opening section of the first insulating layer, and the lowermost layer among the semiconductor layers of the upper Bragg reflector forms an air gap for covering the opening section of the second insulating layer.
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