发明名称 SURFACE-EMITTING LASER AND METHOD FOR MANUFACTURING THE SAME
摘要 [PROBLEMS] To provide a long service life and highly reliable surface-emitting laser structure and to provide a method for manufacturing such surface-emitting laser. [MEANS FOR SOLVING PROBLEMS] A surface-emitting laser is provided with a lower Bragg reflector, which is arranged on an upper section of a substrate and includes a plurality of semiconductor layers, and a resonator, which is arranged on an upper section of the lower Bragg reflector and includes a lower semiconductor layer and an upper semiconductor layer. The lower semiconductor layer includes a first insulating layer having an active layer and an opening section arranged at the lower section of the active layer. The upper semiconductor layer is arranged on an upper section of the active layer and includes a second insulating layer having an opening section. The surface-emitting layer is also provided with an upper Bragg reflector which is arranged on an upper section of the resonator and includes a plurality of semiconductor layers. The uppermost layer among the semiconductor layers of the lower Bragg reflector forms an air gap for covering the opening section of the first insulating layer, and the lowermost layer among the semiconductor layers of the upper Bragg reflector forms an air gap for covering the opening section of the second insulating layer.
申请公布号 KR20090097148(A) 申请公布日期 2009.09.15
申请号 KR20097010144 申请日期 2007.12.18
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 NAKAGAWA SHIGERU
分类号 H01S5/10;H01S5/323 主分类号 H01S5/10
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