INDUCTION HEATING COIL AND METHOD FOR MELTING GRANULES COMPOSED OF SEMICONDUCTOR MATERIAL

摘要

An induction heating coil and a method for melting particle composed of a semiconductor material are provided to maintain a film and solution liquefied by melting a particle composed of the semiconductor material with an induction heating coil. In an induction heating coil and a method for melting particle composed of a semiconductor material, an induction coil melts a particle(13) composed of the semiconductor material on a plate(9) including a discharging tube. A heating coil comprises an upper part and a lower part while having a current guide slot, and an opening for the particle adjacent to the coil body is positioned at the central outside of a coil body(1).