发明名称 Embedded metal features structure
摘要 A method and structure for creating embedded metal features includes embedded trace substrates wherein bias and signal traces are embedded in a first surface of the embedded trace substrate and extend into the body of the embedded trace substrate. The bias trace and signal trace trenches are formed into the substrate body using LASER ablation, or other ablation, techniques. Using ablation techniques to form the bias and signal trace trenches allows for extremely accurate control of the depth, width, shape, and horizontal displacement of the bias and signal trace trenches. As a result, the distance between the bias traces and the signal traces eventually formed in the trenches, and therefore the electrical properties, such as impedance and noise shielding, provided by the bias traces, can be very accurately controlled.
申请公布号 US7589398(B1) 申请公布日期 2009.09.15
申请号 US20060543540 申请日期 2006.10.04
申请人 AMKOR TECHNOLOGY, INC. 发明人 HUEMOELLER RONALD PATRICK;RUSLI SUKIANTO;HINER DAVID JON;KARIM NOZAD OSMAN
分类号 H01L23/58;H01R12/04;H05K3/02 主分类号 H01L23/58
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