摘要 |
The present invention provides exemplary transducer elements, transducer packages and methods of making same. One exemplary transducer element (10) has first and second transducer surfac es (14, 20) and a plurality of tapered pillars (16) that comprise piezoelectric material and extend between the first and second transducer surfaces. At least one of the pillars (16) has a first cross-sectional area at the first tranducer surface (14) that is large r than a second cross-sectional area at the second transducer surface (20). Hence, the transducer has a lower acoustic impedance at the second surface than at the first surface. |