| 摘要 |
<p>A noncontact conveying plate using a space of an antistatic coating layer is provided to reduce manufacturing costs since air is sprayed from between a top plate and an exterior wall and discharging pressure is increased, and there is no need to process an air nozzle. In a noncontact conveying plate using a space of an antistatic coating layer, a settling portion(112) is formed on a top plate. A chamber(114) is formed on the bottom side of the settling portion, and a lower plate(110) is formed on antistatic film layer. A division layer(122) is formed on the bottom side in order to be supplied from the air within the chamber. A guide groove is formed by rounding both edge of the division layer.</p> |
