发明名称 THIN FILM TRANSISTOR, MANUFACTURING METHOD THEREOF, DISPLAY DEVICE, AND MANUFACTURING METHOD THEREOF
摘要 <p>A thin film transistor, a manufacturing method thereof, a display device, and a manufacturing method thereof are provided to reduce process steps for the thin film transistor since there is no need a photo mask to form a gate electrode pattern. In a thin film transistor, a manufacturing method thereof, a display device, and a manufacturing method thereof, a light-shielding layer is formed and a first resist mask is formed on it. A part of the light-shielding layer is etched in order to form the light-shielding layer having a pattern. An underlayer(53) is formed on the light-shielding layer, and a first conductive film(102), a first insulating layer(104), a semiconductor film(106), an impurity semiconductor film(108) and a second conductive film(110) are laminated on the underlayer in order.</p>
申请公布号 KR20090097131(A) 申请公布日期 2009.09.15
申请号 KR20090020213 申请日期 2009.03.10
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 MIYAIRI HIDEKAZU;MIZOGUCHI TAKAFUMI
分类号 H01L29/786;G02F1/136 主分类号 H01L29/786
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