发明名称 COATING DEVICE HAVING SOLVENT BATH
摘要 <p>A coating device having a solvent bath is provided to prevent hardening of nozzle jet part by moving a solvent storage unit to the center of a reaction space and increasing an area where a smoke is generated. In a coating device having a solvent bath, a solvent bath(200) comprises more than one nozzle part(210) storing the injection nozzle area(205) and a predetermined reaction space(215) connected to the nozzle part. A solvent storage unit(220) is installed at the outside of the reaction space and stores solvent. A smoke discharge part(225) guides a smoke generated from the solvent stored in the solvent storage to the reaction space. A coating solution is connected with the reaction space and is dropped from the injection nozzle part.</p>
申请公布号 KR20090096970(A) 申请公布日期 2009.09.15
申请号 KR20080022081 申请日期 2008.03.10
申请人 HYNIX SEMICONDUCTOR INC. 发明人 JEONG, KU CHEOL
分类号 H01L21/027;H01L21/08 主分类号 H01L21/027
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