发明名称 |
MAGNETIC MONITORING OF A FARADAY CUP FOR AN ION IMPLANTER |
摘要 |
This disclosure provides an approach for magnetic monitoring of a Faraday cup for an ion implanter. In this disclosure, there is a vacuum chamber and a Faraday cup located within the vacuum chamber. The Faraday cup is configured to move within the path of an ion beam entering the vacuum chamber. A magnetic monitor located about the vacuum chamber, is configured to distinguish a magnetic field associated with the Faraday cup from stray magnetic fields. |
申请公布号 |
KR20090097183(A) |
申请公布日期 |
2009.09.15 |
申请号 |
KR20097014108 |
申请日期 |
2007.12.03 |
申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
DZENGELESKI JOSEPH P.;EVANS MORGAN D.;SCHEUER JAY THOMAS;SHETTY ASHWIN;SWENSON KENNETH |
分类号 |
H01L21/265;H01J37/30 |
主分类号 |
H01L21/265 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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