发明名称 Semiconductor constructions
摘要 The invention includes a method in which a semiconductor substrate is provided to have a memory array region, and a peripheral region outward of the memory array region. Paired transistors are formed within the memory array region, with such paired transistors sharing a source/drain region corresponding to a bitline contact location, and having other source/drain regions corresponding to capacitor contact locations. A peripheral transistor gate is formed over the peripheral region. Electrically insulative material is formed over the peripheral transistor gate, and also over the bitline contact location. The insulative material is patterned to form sidewall spacers along sidewalls of the peripheral transistor gate, and to form a protective block over the bitline contact location. Subsequently, capacitors are formed which extend over the protective block, and which electrically connect with the capacitor contact locations. The invention also includes semiconductor constructions.
申请公布号 US7589369(B2) 申请公布日期 2009.09.15
申请号 US20080221178 申请日期 2008.07.30
申请人 MICRON TECHNOLOGY, INC. 发明人 HALLER GORDON A.
分类号 H01L27/108 主分类号 H01L27/108
代理机构 代理人
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