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发明名称
INTERFEROMETER ZUR BESTIMMUNG VON EIGENSCHAFTEN EINER OBJEKTOBERFLÄCHE
摘要
申请公布号
AT441831(T)
申请公布日期
2009.09.15
申请号
AT20060718763T
申请日期
2006.01.19
申请人
ZYGO CORPORATION
发明人
DE LEGA, XAVIER;DE GROOT, PETER
分类号
G01B9/02;G01B11/06
主分类号
G01B9/02
代理机构
代理人
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