发明名称 Pattern-free method of making line gratings
摘要 In accordance with the invention, substrate-supported linear arrays are formed by the steps of adhering a thin layer of polymer between a pair of substrates and separating the substrates perpendicular to the layer. The polymer layer separates to form substrate-supported polymer gratings on both substrates, each grating having a period proportional to the thickness of the layer. The process has been used to make gratings with periods in the sub-micron range or larger over areas covering square centimeters.
申请公布号 US7588657(B2) 申请公布日期 2009.09.15
申请号 US20040953906 申请日期 2004.09.29
申请人 PRINCETON UNIVERSITY 发明人 RUSSEL WILLIAM B;CHOU STEPHEN Y;PEASE, III LEONARD F;DESHPANDE PARIKSHIT A
分类号 B32B37/06;B05D1/18;B05D3/12;B22C13/04;B29C65/44;B29C65/48;B32B37/10;B32B37/14;B32B37/16;C08J7/04;G02B6/12;G02B6/124;G02B6/34;H01L21/302;H01L21/304 主分类号 B32B37/06
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