发明名称 |
Pattern-free method of making line gratings |
摘要 |
In accordance with the invention, substrate-supported linear arrays are formed by the steps of adhering a thin layer of polymer between a pair of substrates and separating the substrates perpendicular to the layer. The polymer layer separates to form substrate-supported polymer gratings on both substrates, each grating having a period proportional to the thickness of the layer. The process has been used to make gratings with periods in the sub-micron range or larger over areas covering square centimeters.
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申请公布号 |
US7588657(B2) |
申请公布日期 |
2009.09.15 |
申请号 |
US20040953906 |
申请日期 |
2004.09.29 |
申请人 |
PRINCETON UNIVERSITY |
发明人 |
RUSSEL WILLIAM B;CHOU STEPHEN Y;PEASE, III LEONARD F;DESHPANDE PARIKSHIT A |
分类号 |
B32B37/06;B05D1/18;B05D3/12;B22C13/04;B29C65/44;B29C65/48;B32B37/10;B32B37/14;B32B37/16;C08J7/04;G02B6/12;G02B6/124;G02B6/34;H01L21/302;H01L21/304 |
主分类号 |
B32B37/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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