发明名称 Stacked semiconductor component
摘要 A semiconductor component includes a carrier and multiple semiconductor substrates stacked and interconnected on the carrier. The carrier includes conductive members bonded to corresponding conductive openings on the semiconductor substrates. The component can also include terminal contacts on the carrier in electrical communication with the conductive members, and an outer member for protecting the semiconductor substrates. A method for fabricating the component includes the steps of providing the carrier with the conductive members, and providing the semiconductor substrates with the conductive openings. The method also includes the step of aligning and placing the conductive openings on the conductive members, and then bonding the conductive members to the conductive openings. A system includes the carrier having the conductive members, the semiconductor substrates having the conductive openings, an aligning and placing system for aligning and placing the semiconductor substrates on the carrier, and a bonding system for bonding the conductive members to the conductive openings.
申请公布号 US7589406(B2) 申请公布日期 2009.09.15
申请号 US20050167367 申请日期 2005.06.27
申请人 MICRON TECHNOLOGY, INC. 发明人 WOOD ALAN G.
分类号 H01L23/02 主分类号 H01L23/02
代理机构 代理人
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