SURFACE TREATMENT APPARATUS

摘要

A surface treatment apparatus (100) comprises: a diluent gas supply unit (1), a fluorine gas supply unit (2), a mixer (5) that mixes the diluent gas and fluorine gas, and a reactor (6) that treats the articles to be treated using the mixed gas produced by the mixer (5). The diluent gas supplied by the diluent gas supplier is heated using a heater (8), and the heated diluent gas and the fluorine gas supplied by the fluorine gas supplier are mixed in the mixer (5). The mixed gas is sent to the reactor (6). The gas inside the reactor (6) is channeled from the reactor (6) into flow passages (219, 220, 221, 222) by an exhaust unit (207). Valves (223, 224, 225, 226) are opened in sequence, and the gas within the reactor (6) is sent to an eliminator (208), while the flow of gas inside the reactor (6) is adjusted using the flow passages (219, 220, 221, 222).