INTEGRATED MICRO FUEL CELL APPARATUS

摘要

A micro fuel cell and method of forming such includes depositing multiple layers (22) of alternating metals over a substrate (12); etching at least one metal from the multiple layers (22) creating a void between the remaining layers; forming a plurality of pedestals (28) in the multiple layers (22), each pedestal (28) having a center anode (29) portion and a concentric cathode (31) portion separated by a concentric cavity (31); filling the concentric cavity (31) with an electrolyte; and capping the center anode (29) portion and the concentric cavity (31).