CONTROL APPARATUS, ALIGNING APPARATUS, CONTROL METHOD AND MEASURING APPARATUS

摘要

A control apparatus is provided with an input value generating means for generating a control input value for controlling shift of an object shifting with rolling friction; a correcting means, which sets, as a spring force model, a frictional force of the rolling friction generated when the object shifts, and corrects a control input value based on a transmission coefficient of the model; and a setting means which sets as a variable value, a natural length of a spring in the spring force model. The control apparatus controls shift of the object in accordance with the corrected control input value.