| 摘要 |
<p>A noncontact transfer apparatus is provided with a static pressure table which floats upward a subject (S) to be transferred; a pair of transfer units (10A, 10B) having a vibrating plate (11) and an actuator (12); and a moving apparatus which moves the transfer units (10A, 10B) in a transfer direction. Retaining forces are applied to a leading end section (Sa) and a rear end section (Sb) of the subject (S) facing the vibrating plate (11), by making the vibrating plate (11) excite flexural standing waves by the actuator (12). Then, in the state where the retaining forces are applied to the end sections (Sa, Sb) of the subject (S), the transfer units (10A, 10B) are moved, and the subject (S) is transferred in the transfer direction by following the shift of the transfer units (10A, 10B). Thus, the number of component items is reduced, and the apparatus is reduced in sizes.</p> |
