SCANNER ARRANGEMENT AND METHOD FOR OPTICALLY SCANNING AN OBJECT

摘要

A scanner arrangement for optically scanning an object in a sequence of scanning steps with a driveable object stage and a front objective lens on a carriage moveable parallel to the object stage. The object stage is drivable during the sequence of scanning steps in order to achieve a continuous movement and the objective lens carriage with the front objective lens can be driven forwards in at least one of the scanning steps with a speed which is not equal to the speed of the object stage for a substantial period of time relative to the length of time taken for the at least one scanning step to be performed. The result is that the relative motion of the front objective lens and the object stage during the at least one scanning step allows acquisition of an unblurred image and this corrects for increased magnification and lens aberration.