METHOD AND SYSTEM FOR WASHING ELECTRONIC COMPONENT

摘要

A method of washing electronic components comprises a purifying step of purifying an unused fluorine-containing organic detergent composition liquid by a purifier and a washing step of washing electronic components using the purified detergent composition liquid supplied from the purifier into a washing device. In the purifying step, at least the organic contaminants are removed by a rectifying device and solid contaminants are removed by a filter device.