PROCESS OF MAKING A MICROTUBE AND MICROFLUIDIC DEVICES FORMED THEREWITH

摘要

A process for producing a micromachined tube microtube (50) suitable for microfluidic devices. The process entails isotropically etching a surface of a first substrate (18) to define therein a channel (20) having an arcuate cross-sectional profile, and forming a substrate structure (30) by bonding the first substrate (18) to a second substrate (22) so that the second substrate (22) overlies and encloses the channel (20) to define a passage (32) having a cross-sectional profile of which at least half is arcuate. The substrate structure (30) can optionally then be thinned to define a microtube (50) and walls thereof that surround the passage (32).