METHOD FOR COLLECTING SILICON POWDER FROM SLURRY GENERATED DURING BACK LAPPING PROCESS USING CENTRIFUGE, AND CENTRIFUGE THEREFOR

摘要

There are provided a method for collecting silicon powder from slurry generated during a back lapping process by using a centrifuge, and the centrifuge therefor. The method for collecting silicon powder from slurry generated in a back lapping process by using a centrifuge with a bowl and a screw shaft being both installed horizontally, comprises: a collection step S1 of collecting silicon powder on inner surface of the bowl of the centrifuge in which the slurry is supplied while stopping the screw shaft and rotating the bowl at high speed so that the silicon powder and fluid are separated from the slurry, the separated silicon powder is collected on inner surface of the bowl and the fluid is discharged to a fluid outlet for a time predetermined to collect the silicon powder on inner surface of the bowl; and a discharge step S2 of discharging the silicon powder collected on inner surface of the bowl in which supply of the slurry stops, the bowl rotates at reduced speed to maintain the collected silicon powder on inner surface of the bowl, and the screw shaft which stops in the collection step S1 rotates to discharge the silicon powder collected on inner surface of the bowl for a time predetermined to discharge the silicon powder collected on inner surface of the bowl in the collection step S1.