| 摘要 |
A method for fabricating a semiconductor device comprises forming a channel of a transistor, wherein the channel has a first conductivity type. The method further comprises depositing a layer of dielectric on at least a portion of the channel. The method further comprises etching a notch in the layer of dielectric wherein at least a portion of the notch is etched at least to the channel. The method also comprises doping the portion of the channel in the notch with material of a second conductivity type. The method further comprises filling the notch with polysilicon.
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