发明名称 COOLING DEVICE AND OPERATING METHOD OF COOLING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To prevent pressure applied to a jacket covering a heat generating body from exceeding withstand pressure of the jacket when a liquid begins to be fed in a liquid cooling medium system having a supply pump constituted upstream of the heat generating body and a pressure reduction pump constituted downstream of the heat generating body. <P>SOLUTION: The supply pump 17 is constituted upstream of a coil 13 as the heat generating body and the pressure reduction pump 1 is constituted downstream of the heat generating body, and outputs of the supply pump 17 and pressure reduction pump 1 at a start are controlled by a pump output control system 22. Namely, after the supply pump starts operating with a lower output at the start of liquid feeding than in normal operation, the pressure reduction pump 1 also starts operating with a lower output than in the normal operation. Further, a predetermined output rise time for which the outputs of the supply pump 17 and pressure reduction pump 1 are gradually increased is provided, and the supply pump 17 and pressure reduction pump 1 are made to reach predetermined outputs at the same time. Consequently, the output balance between the supply pump 17 and pressure reduction pump is not lost and the pressure applied to the jacket 11 covering the coil 13 is prevented from exceeding the withstand pressure of the jacket 11. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009206112(A) 申请公布日期 2009.09.10
申请号 JP20080043766 申请日期 2008.02.26
申请人 CANON INC 发明人 SANO HISASHI
分类号 H01L21/027 主分类号 H01L21/027
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